Scanning Probe Microscopy (SPM)

Testing Capabilities

X-POWER offers comprehensive characterization of surfaces and thin films using different modes of SPM allowing to measure topography, mechanical, electrical and magnetic properties as well as providing mechanical and electrical manipulations.

Potential to Research and Industry Service

• Support research on materials problems in electronic components.
• Support research on degradation testing of components.
• Support research on failure mechanisms in capacitors. 

Using the SPM, images of surfaces are acquired by mechanical movement of the probe in a raster scan of the specimen and recording the probe-surface interaction as a function of position. The resolution can be on the order of a fraction of a nanometer. Depending on the type of measured force (interaction) one can map topography, electrostatic surface potential, capacitance variations, current distribution, magnetic ordering, piezoresponce, lateral and elastic forces across a given surface area. The probes can also be used for manipulations on the nanoscale, i.e. applying mechanical forces (contact force lithography) or electrical potential (electrical lithography).

The Ntegra-Aura SPM is equipped by an (i) optical microscope allowing precisely chose the scan area, (ii) dumping table decoupling the system from external vibration and (iii) a vacuum hood allowing for the measurements in low vacuum or controlled atmosphere (for example, in inert nitrogen). The advantage of the system is a module concept allowing for quick exchange from one scanning mode to another. The controller is equipped with a multi lock-in amplifier capable in measuring a number of different signals simultaneously.

Key Figures of the Scanning Probe Microscope

• Operation environment: ambient air/nitrogen atmosphere/low vacuum (down to 10-2 mbar), room temperature
• Sample size: from 1x1 mm2 to 50 mm in diameter
• Scan area: up to 160x160 µm2
• Height resolution: a fraction of nm
• Lateral resolution: depends on sharpness of tip (can be down to 5 nm)
• Available modes: atomic force microscopy (AFM) in contact, semi-contact and non-contact regimes, force spectroscopy and lateral force microscopy (LFM), scanning tunneling microscopy (STM), electrostatic and Kelvin probe force microscopies (KPFM), scanning spreading resistance microscopy (SSRM), magnetic force microscopy (MFM), force and electrical lithography.